Two dimensional silicon micromachined optical scanner integrated with photo detector and piezoresistor

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 293-296

  Ikeda, Masaaki ^a   Goto, Hiroshi ^a   Sakata, Minoru ^a   Wakabayashi, Syuichi ^a   Imanaka, Koichi ^a   Takeuchi, Masashi ^a   Yada, Tuneji ^a  

^a OMRON CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED OPTOELECTRONICS; MICROELECTRONIC PROCESSING; MICROMACHINING; NATURAL FREQUENCIES; OPTICAL SENSORS; PHOTODETECTORS; PHOTOSENSITIVITY; PIEZOELECTRIC DEVICES; RESISTORS; RESONATORS; SCANNING;

LIGHT BEAM SPOT; PHOTODETECTION; PIEZORESISTORS; SCANNING ANGLE; SILICON MICROMACHINED OPTICAL SCANNER; SILICON MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0029487257     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)