Vibration mode investigation of a resonant silicon tube structure for use as a fluid density sensor

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 133-138

  Enoksson, Peter ^a   Stemme, Goran ^a   Stemme, Erik ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; DENSITY MEASUREMENT (SPECIFIC GRAVITY); ETCHING; FLUIDS; MICROMACHINING; NATURAL FREQUENCIES; OSCILLATIONS; SEMICONDUCTING SILICON; SINGLE CRYSTALS; TUBES (COMPONENTS); VIBRATIONS (MECHANICAL);

FLUID DENSITY SENSOR; RESONANT SILICON TUBE STRUCTURE; SILICON FUSION BONDING; VIBRATING TUBE SYSTEM;

SILICON SENSORS;

EID: 0029204725     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)