DEEMO: a new technology for the fabrication of microstructures

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 238-243

  Elders, J ^a   Jansen, H V ^a   Elwenspoek, M ^a   Ehrfeld, W ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ASPECT RATIO; DIAPHRAGMS; DRY ETCHING; ELECTRODES; ELECTROPLATING; ELECTROSTATICS; METAL MOLDING; METALLOGRAPHIC MICROSTRUCTURE; NOZZLES; SEMICONDUCTING SILICON; SENSORS;

DIRECTIONAL FREEDOM; EMBOSSING; GEOMETRICAL FREEDOM; HIGH ETCH RATES; MICROMOULDS;

MICROMACHINING;

EID: 0029180435     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)