Optical micro encoder using surface-emitting laser

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 412-417

  Miyajima, Hiroshi ^a   Yamamoto, Eiji ^a   Ito, Masataka ^a   Hashimoto, Sakae ^a   Komazaki, Iwao ^a   Shinohara, Shinobu ^a   Yanagisawa, Kazuhisa ^a  

^a OLYMPUS CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE DIFFRACTION; GLASS; IRRADIATION; LENSES; OPTICAL RESOLVING POWER; OPTICAL SENSORS; PHOTODETECTORS; SEMICONDUCTING SILICON; SUBSTRATES;

DIFFRACTION PATTERN; GLASS SUBSTRATE; MICROLENSES; OPTICAL MICRO ENCODER; SURFACE EMITTING LASER;

SEMICONDUCTOR LASERS;

EID: 0029777756     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)