Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch x-ray lithography

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 191-196

  Hirata, Yoshihiro ^a   Okuyama, Hiroshi ^a   Ogino, Seiji ^a   Numazawa, Toshiyuki ^a   Takada, Hiroshi ^a  

^a SUMITOMO ELECTRIC INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CERAMIC MATERIALS; COMPOSITE MATERIALS; FREQUENCIES; PIEZOELECTRICITY; PLASMA ETCHING; POLYMERS; SINTERING; ULTRASONIC TRANSDUCERS; X RAY LITHOGRAPHY;

DEEP ETCH X RAY LITHOGRAPHY; LEAD ZIRCONATE TITANATE CERAMICS; MICRO ULTRASONIC TRANSDUCER; PIEZOELECTRIC COMPOSITES; RESIST REMOVAL;

PIEZOELECTRIC MATERIALS;

EID: 0029192163     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)