Electrostatic polysilicon microrelays integrated with MOSFETs

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 97-101

  Gretillat, M A ^a   Thiebaud, P ^a   de Rooij, N F ^a   Linder, C ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC SWITCHES; ELECTRONIC EQUIPMENT; ELECTROSTATICS; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; MOS DEVICES; MOSFET DEVICES; SEMICONDUCTOR DEVICE MANUFACTURE;

ELECTRICAL SIGNAL; ELECTROMAGNETIC ACTUATION; ELECTROMECHANICAL PROPERTIES; ELECTROSTATIC POLYSILICON MICRORELAYS; MICROELECTROMECHANICAL SYSTEM; NITROGEN ATMOSPHERE; SACRIFICIAL LAYER ETCHING; TRANSISTOR BASED SWITCHES;

SEMICONDUCTOR RELAYS;

EID: 0028098356     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)