Bistable microvalve with pneumatically coupled membranes

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 384-388

  Wagner, B ^a   Quenzer, H J ^a   Hoerschelmann, S ^a   Lisec, T ^a   Juerss, M ^a  

^a Fraunhofer Institute Reliability and Microintegration   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRODES; ELECTROSTATIC DEVICES; LITHOGRAPHY; MEMBRANES; PNEUMATIC DRIVES; SEMICONDUCTING SILICON; SILICA;

ELECTROSTATIC ACTUATORS; GREY TONE LITHOGRAPHY; MICROVALVES; PNEUMATIC COUPLING;

VALVES (MECHANICAL);

EID: 0029755925     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)