SILICON-BASED MICROMECHANICAL SWITCHES FOR INDUSTRIAL APPLICATIONS.

Volumn , Issue , 1987, Pages

  Allen, Henry V ^a  

^a IC Sensors Subsidiary of MSI   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTING SILICON COMPOUNDS - APPLICATIONS;

ACCELEROMETER SWITCH; MICROMECHANICAL SWITCHES; MICROSTRUCTURES; PRESSURE SWITCH;

ELECTRIC SWITCHES, SEMICONDUCTOR;

EID: 0023592283     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)