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Volumn , Issue , 1996, Pages 395-399
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Micro Electro Thermo Fluidic (METF) liquid microprocessor
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
AUTOMATION;
BIOCHEMISTRY;
CHEMICAL ANALYSIS;
MICROELECTRONICS;
MICROPROCESSOR CHIPS;
RELIABILITY;
SEMICONDUCTING SILICON;
SENSORS;
VALVES (MECHANICAL);
BIOCHEMICAL ANALYSIS;
LIQUID MICROPROCESSOR;
MICROELECTROTHERMOFLUIDIC VALVES;
MICROVALVES;
MINIATURIZATION;
MICROELECTROMECHANICAL DEVICES;
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EID: 0029753180
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (2)
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References (3)
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