Linear microvibromotor for positioning optical components

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 55-60

  Daneman, M J ^a   Tien, N C ^a   Solgaard, O ^a   Pisano, A P ^a   Lau, K Y ^a   Muller, R S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; ELECTRIC FIELDS; ELECTROSTATIC DEVICES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; OPTICAL MATERIALS; POSITION CONTROL; RESONATORS; VELOCITY CONTROL; VIBRATORS;

COMB RESONATORS; LINEAR MICROVIBROMOTOR; OPTICAL COMPONENTS; SUBMICRON POSITIONING RESOLUTION; SURFACE MICROMACHINING; TRAVEL RANGE;

LINEAR MOTORS;

EID: 0029179039     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)