Real three dimensional micro fabrication using stereo lithography and metal molding

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 42-47

  Ikuta, Koji ^a   Hirowatari, Ken ^a  

^a KYUSHU INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

METALS; POLYMERS;

IH PROCESS; INTEGRATED HARDEN POLYMER STEREO LITHOGRAPHY; MICRO FABRICATION TECHNIQUE; STEREO LITHOGRAPHY; THREE DIMENSIONAL MICRO FABRICATION;

ELECTROMECHANICAL DEVICES;

EID: 0027147052     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)