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Volumn , Issue , 1994, Pages 471-478
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Micro systems technology
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
BONDING;
DEPOSITION;
ETCHING;
INTEGRATED CIRCUIT LAYOUT;
INTEGRATED CIRCUIT MANUFACTURE;
MICROELECTRONICS;
MICROMACHINING;
NETWORK COMPONENTS;
PHOTOLITHOGRAPHY;
PRODUCT DESIGN;
SENSORS;
BULK MICROMACHINING;
MICROSYSTEMS TECHNOLOGY;
MOLECULAR ENGINEERING;
SURFACE MICROMACHINING;
MICROPROCESSOR CHIPS;
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EID: 0028132543
PISSN: 08865930
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (2)
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References (17)
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