Novel functionality using micro-gaseous devices

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 72-76

  Nathanson, Harvey C ^a   Liberman, Irv ^a   Freidhoff, Carl ^a  

^a WESTINGHOUSE ELECTRIC COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPLICATION SPECIFIC INTEGRATED CIRCUITS; ARTIFICIAL INTELLIGENCE; ATOMIC CLOCKS; CALCULATIONS; CERAMIC MATERIALS; DATA COMMUNICATION SYSTEMS; ELECTROSTATICS; GLOBAL POSITIONING SYSTEM; MASS SPECTROMETERS; NUMERICAL METHODS; PRINTED CIRCUIT MANUFACTURE;

CANTILEVER DENSITY; MICRO GASEOUS DEVICES; MINIATURE ATOMIC CESIUM CELL CLOCK;

MICROELECTROMECHANICAL DEVICES;

EID: 0029181918     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)