Silicon microfabricated horns for power ultrasonics

Sensors and Actuators, A: Physical

Volumn 54, Issue 1-3, 1996, Pages 542-546

  Lal, Amit ^a   White, Richard M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Horns; Microfabrication; Power ultrasonics; Silicon

Indexed keywords

EID: 0000928110     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80011-8     Document Type: Article

References (13)

1. A. Lal and R.M. White, Silicon micromachined ultrasonic microcutter, IEEE Ultrasonics Symp., Cannes, France, 1-4 Nov., 1994.
2. S. Charles, R. Williams and T.L. Poteat, Micromachined structures in ophthalmic microsurgery, Sensors and Actuators, A21-A23 (1990) 263-266.
3. T. Sashida, An Introduction to Ultrasonic Motors, Clarendon Press, Oxford, 1993.
4. K. Suslik, Ultrasound: Its Chemical, Physical, and Biological Effects, VCH, New York, 1988.
5. W.P. Mason, Physical Acoustics and the Properties of Solids, Van Nostrand, Princeton, NJ, 1958, pp. 158-162.
6. K. Najafi and K. Wise, A high-yield IC compatible multi-channel recording array, IEEE Trans. Electron Devices, ED-32 (1985) 1206-1211.
7. S. Charles, R. Williams and T.L. Poteat, Micromachined structures in ophthalmic microsurgery, Sensors and Actuators, A21-A23 (1990) 263-266.
8. F.V. Hunt, Stress and strain limits on the attainable velocity in mechanical vibration, J. Acoust. Soc. Am., 32 (1960) 1123-1128.
9. M.F. Ashby, Materials Selection in Mechanical Design, Pergamon, Oxford, 1992.
10. K.E. Petersen, Silicon as a mechanical material, Proc. IEEE, 70 (1982) 420-457.
11. C.J. Smithels (ed.), Metals Reference Handbook, Butterworths, London, 1976.
12. K.F. Graff, Wave Motion in Elastic Solids, Dover, New York, 1975.
13. E. Eisner, Complete solutions of the Webster horn equation, J. Acoust. Soc. Am., 32 (4) (1967).