Micropump manufactured by thermoplastic molding

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 18-21

  Bustgens, B ^a   Bacher, W ^a   Menz, W ^a   Schomburg, W K ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC CURRENTS; FLOW OF FLUIDS; GASES; MACHINE DESIGN; PLASTICS MOLDING; PNEUMATIC CONTROL EQUIPMENT; POLYIMIDES; POLYMERIC MEMBRANES; PUMPS; VALVES (MECHANICAL); WIRE;

LATERAL DIMENSIONS; MICROPUMP; POLYIMIDE MEMBRANE; POLYSULFONE; POLYVINYLIDENE FLUORIDE; THERMOPLASTIC MOLDING; TITANIUM WIRE;

MICROELECTRONIC PROCESSING;

EID: 0028061038     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)