Micro-machined array probe card

Technical Digest - International Electron Devices Meeting, IEDM

Volumn 1992-December, Issue , 1992, Pages 509-512

  Beiley, M A ^a   Wong, S S ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DEVICES; SILICON WAFERS;

ARRAY PROBE; ELEVATED-TEMPERATURE TESTING; IC TECHNOLOGY; INTERFACIAL OXIDES; MICRO-MACHINED; PARASITICS; PROBE CARDS; PROBE TIPS;

PROBES;

EID: 84939736024     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.1992.307412     Document Type: Conference Paper

References (2)

1. B. Leslie and F. Matta, "Membrane probe card technology, " Proceedings of the IEEE International Test Conference, pp. 601-607, 1988.
2. M. Beiley, E Ichishita, C. Nguyen, and S. Wong, "Array probe card, " Proceedings of the Multi-Chip Module Conference, pp. 28-31, 1992.