Fabrication of advanced integrated optical micro-encoder chip

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1994, Pages 337-342

  Sawada, R ^a   Ohguchi, O ^a   Mise, K ^a   Tsubamoto, M ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; FABRICATION; INTEGRATED OPTICS; OPTICAL FILMS; OPTICAL RESOLVING POWER; POLYIMIDES; SEMICONDUCTOR LASERS; WAVEGUIDES;

GRADIENT REFRACTIVE LENS FILM; INTEGRATED OPTICAL MICROENCODER; LASER DIODE; PHASE SHIFTING FILM; POLYIMIDE WAVEGUIDES;

OPTICAL DEVICES;

EID: 0028014976     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)