Intergrated micro-liquid dosing system

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 254-259

  Lammerink, Theo S J ^a   Elwenspoek, Miko ^a   Fluitman, Jan H J ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

LIQUIDS; MICROELECTROMECHANICAL DEVICES; MIXERS (MACHINERY); SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES;

MICRO-LIQUID DOSING SYSTEM; MICRO-LIQUID FLOW SENSOR; MICRO-PUMP;

FLOWMETERS;

EID: 0027147271     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)