Micromachined 1×2 optical fiber switch

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 344-347

  Field, Leslie A ^a   Burriesci, Diane L ^a   Robrish, Peter R ^a   Ruby, Richard C ^a  

^a HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ANISOTROPY; DESIGN; ELECTROPLATING; ETCHING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL FIBERS; SEMICONDUCTING SILICON; SWITCHING FUNCTIONS;

CANTILEVERS; ETCHED DEFLECTION SCALES; FORCE GAUGES; NICKEL ACTUATORS; OPTICAL FIBER SWITCH; SWITCH ACTUATORS;

OPTICAL SWITCHES;

EID: 0029488599     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)