LIGA and related technologies for industrial application

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 1, Issue , 1995, Pages 552-555

  Menz, W ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; INDUSTRIAL APPLICATIONS; MICROELECTRONICS; TECHNOLOGY;

HYBRIDIZATION; MICROCOMPONENTS; MICROSYSTEM TECHNOLOGY;

MICROELECTRONIC PROCESSING;

EID: 0029543030     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)