메뉴 건너뛰기




Volumn 54, Issue 3, 2014, Pages 541-560

A journey towards reliability improvement of TiO2 based Resistive Random Access Memory: A review

Author keywords

[No Author keywords available]

Indexed keywords

HIGH DIELECTRIC CONSTANTS; HIGH TEMPERATURE STABILITY; MATERIAL PREPARATION; RELIABILITY IMPROVEMENT; RESISTIVE RANDOM ACCESS MEMORY; RESISTIVE RANDOM ACCESS MEMORY (RRAM); SEMICONDUCTING OXIDE; SWITCHING PERFORMANCE;

EID: 84896722211     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2013.11.013     Document Type: Review
Times cited : (109)

References (135)
  • 1
    • 0038336030 scopus 로고
    • Potential distribution and negative resistance in thin oxide films
    • T.W. Hickmott Potential distribution and negative resistance in thin oxide films J Appl Phys 35 1964 2679
    • (1964) J Appl Phys , vol.35 , pp. 2679
    • Hickmott, T.W.1
  • 3
    • 79956064739 scopus 로고    scopus 로고
    • Nanofilamentary resistive switching in binary oxide system; A review on the present status and outlook
    • K.M. Kim, D.S. Jeong, and C.S. Hwang Nanofilamentary resistive switching in binary oxide system; a review on the present status and outlook Nanotechnology 22 2011 254002
    • (2011) Nanotechnology , vol.22 , pp. 254002
    • Kim, K.M.1    Jeong, D.S.2    Hwang, C.S.3
  • 4
    • 64749107196 scopus 로고    scopus 로고
    • Nonvolatile memory concepts based on resistive switching in inorganic materials
    • T. Mikolajick, M. Salinga, M. Kund, and T. Kever Nonvolatile memory concepts based on resistive switching in inorganic materials Adv Eng Mater 11 2009 235
    • (2009) Adv Eng Mater , vol.11 , pp. 235
    • Mikolajick, T.1    Salinga, M.2    Kund, M.3    Kever, T.4
  • 8
    • 2942548117 scopus 로고    scopus 로고
    • Nonvolatile memory with multilevel switching: A basic model
    • M.J. Rozenberg, I.H. Inoue, and M.J. Sanchez Nonvolatile memory with multilevel switching: a basic model Phys Rev Lett 92 2004 178302
    • (2004) Phys Rev Lett , vol.92 , pp. 178302
    • Rozenberg, M.J.1    Inoue, I.H.2    Sanchez, M.J.3
  • 10
    • 84885298391 scopus 로고    scopus 로고
    • 2-based structures for nanoscale memory applications
    • 2-based structures for nanoscale memory applications Mater Sci Semicond Process 16 2013 1186
    • (2013) Mater Sci Semicond Process , vol.16 , pp. 1186
    • Frohlich, K.1
  • 11
    • 79960926644 scopus 로고    scopus 로고
    • Challenges and opportunities for future non-volatile memory technology
    • Y. Nishi Challenges and opportunities for future non-volatile memory technology Curr Appl Phys 11 2011 e101
    • (2011) Curr Appl Phys , vol.11 , pp. 101
    • Nishi, Y.1
  • 15
    • 77951622926 scopus 로고    scopus 로고
    • Complementary resistive switches for passive nanocrossbar memories
    • E. Linn, R. Rosezin, C. Kügeler, and R. Waser Complementary resistive switches for passive nanocrossbar memories Nat Mater 9 2010 403
    • (2010) Nat Mater , vol.9 , pp. 403
    • Linn, E.1    Rosezin, R.2    Kügeler, C.3    Waser, R.4
  • 16
    • 0001331485 scopus 로고    scopus 로고
    • Reproducible switching effect in thin oxide films for memory applications
    • A. Beck, J.G. Bednorz, C. Gerber, C. Rossel, and D. Widmer Reproducible switching effect in thin oxide films for memory applications Appl Phys Lett 77 2000 139
    • (2000) Appl Phys Lett , vol.77 , pp. 139
    • Beck, A.1    Bednorz, J.G.2    Gerber, C.3    Rossel, C.4    Widmer, D.5
  • 18
    • 49149097171 scopus 로고    scopus 로고
    • Effects of metal electrodes on the resistive memory switching property of NiO thin films
    • C.B. Lee, B.S. Kang, A. Benayad, M.J. Lee, S.E. Ahn, and K.H. Kim Effects of metal electrodes on the resistive memory switching property of NiO thin films Appl Phys Lett 93 2008 042115
    • (2008) Appl Phys Lett , vol.93 , pp. 042115
    • Lee, C.B.1    Kang, B.S.2    Benayad, A.3    Lee, M.J.4    Ahn, S.E.5    Kim, K.H.6
  • 23
    • 77649236632 scopus 로고    scopus 로고
    • Understanding the switching mechanism of polymer memory
    • W.L. Kwan, B. Lei, Y. Shao, and Y. Yang Understanding the switching mechanism of polymer memory Curr Appl Phys 10 2010 e50
    • (2010) Curr Appl Phys , vol.10 , pp. 50
    • Kwan, W.L.1    Lei, B.2    Shao, Y.3    Yang, Y.4
  • 24
    • 84857455854 scopus 로고    scopus 로고
    • The application of conventional photolithography to microscale organic resistive memory devices
    • B. Cho, K.H. Nam, S. Song, Y. Ji, G.Y. Jung, and T. Le The application of conventional photolithography to microscale organic resistive memory devices Curr Appl Phys 12 2012 e940
    • (2012) Curr Appl Phys , vol.12 , pp. 940
    • Cho, B.1    Nam, K.H.2    Song, S.3    Ji, Y.4    Jung, G.Y.5    Le, T.6
  • 26
    • 67650102619 scopus 로고    scopus 로고
    • Redox-based resistive switching memories nanoionic mechanisms, prospects, and challenges
    • R. Waser, R. Dittmann, G. Staikov, and K. Szot Redox-based resistive switching memories nanoionic mechanisms, prospects, and challenges Adv Mater 21 2009 2632
    • (2009) Adv Mater , vol.21 , pp. 2632
    • Waser, R.1    Dittmann, R.2    Staikov, G.3    Szot, K.4
  • 29
    • 0037233037 scopus 로고    scopus 로고
    • The surface science of titanium dioxide
    • U. Diebold The surface science of titanium dioxide Surface Sci Report 48 2003 53
    • (2003) Surface Sci Report , vol.48 , pp. 53
    • Diebold, U.1
  • 34
    • 84872860550 scopus 로고    scopus 로고
    • 2-based resistive switches
    • 2-based resistive switches J Appl Phys 113 2013 033707
    • (2013) J Appl Phys , vol.113 , pp. 033707
    • Gu, T.1
  • 36
    • 80051793222 scopus 로고    scopus 로고
    • Effect of the oxygen vacancy gradient in titanium dioxide on the switching direction of bipolar resistive memory
    • M.G. Sunga, S.J. Kim, M.S. Joo, J.S. Roh, C. Ryu, and S. Hong et al. Effect of the oxygen vacancy gradient in titanium dioxide on the switching direction of bipolar resistive memory Solid-State Electronics 63 2011 115
    • (2011) Solid-State Electronics , vol.63 , pp. 115
    • Sunga, M.G.1    Kim, S.J.2    Joo, M.S.3    Roh, J.S.4    Ryu, C.5    Hong, S.6
  • 39
    • 77954214958 scopus 로고    scopus 로고
    • Function by defects at the atomic scale - New concepts for non-volatile memories
    • R. Waser, R. Dittmann, M. Salinga, and M. Wuttig Function by defects at the atomic scale - new concepts for non-volatile memories Solid-state Electronics 54 2010 830
    • (2010) Solid-state Electronics , vol.54 , pp. 830
    • Waser, R.1    Dittmann, R.2    Salinga, M.3    Wuttig, M.4
  • 41
    • 77958591143 scopus 로고    scopus 로고
    • Forming and switching mechanisms of a cation-migration-based oxide resistive memory
    • T. Tsuruoka, K. Terabe, T. Hasegawa, and M. Aono Forming and switching mechanisms of a cation-migration-based oxide resistive memory Nanotechnology 21 2010 425205
    • (2010) Nanotechnology , vol.21 , pp. 425205
    • Tsuruoka, T.1    Terabe, K.2    Hasegawa, T.3    Aono, M.4
  • 45
    • 79959331828 scopus 로고    scopus 로고
    • Materials, technologies, and circuit concepts for nanocrossbar-based bipolar RRAM
    • C. Kügeler, R. Rosezin, E. Linn, R. Bruchhaus, and R. Waser Materials, technologies, and circuit concepts for nanocrossbar-based bipolar RRAM Appl Phys A 102 2011 791
    • (2011) Appl Phys A , vol.102 , pp. 791
    • Kügeler, C.1    Rosezin, R.2    Linn, E.3    Bruchhaus, R.4    Waser, R.5
  • 49
    • 10844282779 scopus 로고    scopus 로고
    • High dielectric constant oxides
    • J. Robertson High dielectric constant oxides Eur Phys J Appl Phys 28 2004 265
    • (2004) Eur Phys J Appl Phys , vol.28 , pp. 265
    • Robertson, J.1
  • 50
    • 65249091964 scopus 로고    scopus 로고
    • Resistive switching memory devices composed of binary transition metal oxides using sol-gel chemistry
    • C. Lee, I. Kim, W. Choi, H. Shin, and J. Cho Resistive switching memory devices composed of binary transition metal oxides using sol-gel chemistry Langmuir 25 2009 4274
    • (2009) Langmuir , vol.25 , pp. 4274
    • Lee, C.1    Kim, I.2    Choi, W.3    Shin, H.4    Cho, J.5
  • 58
    • 84869884786 scopus 로고    scopus 로고
    • Memristor structures for high scalability: Non-linear and symmetric devices utilizing fabrication friendly materials and processes
    • J.H. Nickel, J.P. Strachan, M.D. Pickett, C.T. Schamp, J.J. Yang, and J.A. Graham et al. Memristor structures for high scalability: non-linear and symmetric devices utilizing fabrication friendly materials and processes Microelectron Eng 103 2013 66
    • (2013) Microelectron Eng , vol.103 , pp. 66
    • Nickel, J.H.1    Strachan, J.P.2    Pickett, M.D.3    Schamp, C.T.4    Yang, J.J.5    Graham, J.A.6
  • 69
    • 80054980235 scopus 로고    scopus 로고
    • x/CdSe quantum dot/indium tin-oxide structure
    • x/CdSe quantum dot/indium tin-oxide structure J Appl Phys 110 2011 074505
    • (2011) J Appl Phys , vol.110 , pp. 074505
    • Kannan, V.1    Rhee, J.K.2
  • 70
    • 0000646519 scopus 로고
    • Titanium isopropoxide as a precursor in atomic layer epitaxy of titanium dioxide thin films
    • M. Ritala, M. Leskela, L. Niinisto, and P. Haussalo Titanium isopropoxide as a precursor in atomic layer epitaxy of titanium dioxide thin films Chem Mater 5 1993 1174
    • (1993) Chem Mater , vol.5 , pp. 1174
    • Ritala, M.1    Leskela, M.2    Niinisto, L.3    Haussalo, P.4
  • 77
    • 84865977457 scopus 로고    scopus 로고
    • 2 nanotubes on transparent substrates and their resistive switching characteristics
    • 2 nanotubes on transparent substrates and their resistive switching characteristics J Phys D: Appl Phys 45 2012 355306
    • (2012) J Phys D: Appl Phys , vol.45 , pp. 355306
    • Chu, D.1    Younis, A.2    Li, S.3
  • 81
    • 35748974883 scopus 로고    scopus 로고
    • Nanoionics-based resistive switching memories
    • R. Waser, and M. Aono Nanoionics-based resistive switching memories Nat Mater 6 2007 833
    • (2007) Nat Mater , vol.6 , pp. 833
    • Waser, R.1    Aono, M.2
  • 82
    • 84859248089 scopus 로고    scopus 로고
    • Improving the electrical performance of resistive switching memory using doping technology
    • W. Yan, L. Qi, L.H. Bing, L.S. Bing, W. Wei, and L.Y. Tao et al. Improving the electrical performance of resistive switching memory using doping technology Chin Sci Bull 17 2012 1235
    • (2012) Chin Sci Bull , vol.17 , pp. 1235
    • Yan, W.1    Qi, L.2    Bing, L.H.3    Bing, L.S.4    Wei, W.5    Tao, L.Y.6
  • 83
    • 79952162520 scopus 로고    scopus 로고
    • Approaches for improving the performance of filament-type resistive switching memory
    • L.W. Tai, L.S. Bing, L.H. Bing, L. Qi, L.Y. Tao, and Z. Sen et al. Approaches for improving the performance of filament-type resistive switching memory Chin Sci Bull 56 2011 461
    • (2011) Chin Sci Bull , vol.56 , pp. 461
    • Tai, L.W.1    Bing, L.S.2    Bing, L.H.3    Qi, L.4    Tao, L.Y.5    Sen, Z.6
  • 89
    • 79951947569 scopus 로고    scopus 로고
    • Modelling of retention failure behaviour in bipolar oxide-based resistive switching memory
    • B. Gao, H. Zhang, B. Chen, L. Liu, X. Liu, and R. Han et al. Modelling of retention failure behaviour in bipolar oxide-based resistive switching memory IEEE Electron Device Lett 32 2011 276 278
    • (2011) IEEE Electron Device Lett , vol.32 , pp. 276-278
    • Gao, B.1    Zhang, H.2    Chen, B.3    Liu, L.4    Liu, X.5    Han, R.6
  • 93
    • 2442670646 scopus 로고    scopus 로고
    • Growth of titanium dioxide thin films via a metallurgical route and characterizations for chemical gas sensors
    • S.K. Hazra, S. Roy, and S. Basu Growth of titanium dioxide thin films via a metallurgical route and characterizations for chemical gas sensors Mater Sci Eng B 110 2004 195
    • (2004) Mater Sci Eng B , vol.110 , pp. 195
    • Hazra, S.K.1    Roy, S.2    Basu, S.3
  • 99
    • 84859545756 scopus 로고    scopus 로고
    • The role of contact size on the formation of Schottky barriers and ohmic contacts at nanoscale metal-semiconductor interfaces
    • R.A. Krayaand, and L.Y. Kraya The role of contact size on the formation of Schottky barriers and ohmic contacts at nanoscale metal-semiconductor interfaces J Appl Phys 111 2012 064302
    • (2012) J Appl Phys , vol.111 , pp. 064302
    • Krayaand, R.A.1    Kraya, L.Y.2
  • 104
    • 36149023551 scopus 로고
    • Simplified theory of space-charge-limited currents in an insulator with traps
    • M.A. Lampert Simplified theory of space-charge-limited currents in an insulator with traps Phys Rev 103 1956 1648
    • (1956) Phys Rev , vol.103 , pp. 1648
    • Lampert, M.A.1
  • 109
    • 79959382969 scopus 로고    scopus 로고
    • Thermodynamics of second phase conductive filaments
    • V.G. Karpov, M. Nardone, and M. Simon Thermodynamics of second phase conductive filaments J Appl Phys 109 2001 114507
    • (2001) J Appl Phys , vol.109 , pp. 114507
    • Karpov, V.G.1    Nardone, M.2    Simon, M.3
  • 111
    • 0004485502 scopus 로고
    • Electrolytic reduction and Ellingham diagrams for oxy-anion systems
    • H.E. Bartlett, and K.E. Johnson Electrolytic reduction and Ellingham diagrams for oxy-anion systems Can J Chem 44 1966 2119
    • (1966) Can J Chem , vol.44 , pp. 2119
    • Bartlett, H.E.1    Johnson, K.E.2
  • 112
    • 0033140816 scopus 로고    scopus 로고
    • Thermodynamic modelling of the system titanium-oxygen
    • P. Waldner, and G. Eriksson Thermodynamic modelling of the system titanium-oxygen Calphad 23 1999 189
    • (1999) Calphad , vol.23 , pp. 189
    • Waldner, P.1    Eriksson, G.2
  • 115
    • 77955583956 scopus 로고    scopus 로고
    • Self-aligned memristor cross-point arrays fabricated with one nanoimprint lithography step
    • Q. Xia, J.J. Yang, W. Wu, X. Li, and R.S. Williams Self-aligned memristor cross-point arrays fabricated with one nanoimprint lithography step Nano Lett 10 2010 2909
    • (2010) Nano Lett , vol.10 , pp. 2909
    • Xia, Q.1    Yang, J.J.2    Wu, W.3    Li, X.4    Williams, R.S.5
  • 118
    • 79951825640 scopus 로고    scopus 로고
    • 2-based Metal-Insulator-Metal selection device for bipolar Resistive Random Access Memory cross-point application
    • 2-based Metal-Insulator-Metal selection device for bipolar Resistive Random Access Memory cross-point application J Appl Phys 109 2011 033712
    • (2011) J Appl Phys , vol.109 , pp. 033712
    • Shin, J.1    Kim, I.2    Biju, K.P.3    Jo, M.4    Park, J.5    Lee, J.6
  • 124
    • 78650114230 scopus 로고    scopus 로고
    • Current status of nonvolatile semiconductor memory technology
    • Y. Fujisaki Current status of nonvolatile semiconductor memory technology Jpn J Appl Phys 49 2010 100001
    • (2010) Jpn J Appl Phys , vol.49 , pp. 100001
    • Fujisaki, Y.1
  • 134
    • 67849088537 scopus 로고    scopus 로고
    • 2 thin films - Influence of annealing temperature on structural, optical and photocatalytic properties
    • 2 thin films - influence of annealing temperature on structural, optical and photocatalytic properties Sol Energy 83 2009 1499
    • (2009) Sol Energy , vol.83 , pp. 1499
    • Mathews, N.R.1    Morales, E.R.2    Jacome, M.A.C.3    Antonio, J.A.T.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.