Stamp fabrication by step and stamp nanoimprinting

VTT Publications

Volumn , Issue 758, 2011, Pages 1-79

  Haatainen, Tomi ^a  

^a NONE

Author keywords

Hot embossing; Nanoimprinting; Stamp replication

Indexed keywords

ELECTROPLATING PROCESS; FABRICATION PROCESS; FLUORINATED POLYMERS; HOT-EMBOSSING; IMPRINT LITHOGRAPHY; IMPRINT RESIST; IMPRINTED POLYMERS; IMPRINTING PROCESS; LIFT-OFF PROCESS; LOW COSTS; MASTER MOLDS; MECHANICAL DEFORMATION; NANO-IMPRINTING; NANO-METER-SCALE; PATTERN TRANSFERS; PATTERNING METHODS; POLYMER MOLDS; POTENTIAL METHODS; REPLICATION METHOD; REPLICATION PROCESS; ROLL EMBOSSING; ROLL TO ROLL; SILICON STAMP; STAMP REPLICATION; SUBMICRON SCALE;

ELECTRON BEAMS; FLUORINE CONTAINING POLYMERS; METAL STAMPING; MOLDS; NANOIMPRINT LITHOGRAPHY; POLYMERS;

FABRICATION;

EID: 80054955155     PISSN: 12350621     EISSN: 14550849     Source Type: Book Series    
DOI: None     Document Type: Article

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