Fabrication and surface treatment of silicon mold for polymer microarray

Surface and Coatings Technology

Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 452-458

  Jo, Soo Beom ^a   Lee, Min Woo ^a   Park, Se Geun ^a   Suh, Jung Keun ^b   O, Beom Hoan ^a  

^a Inha University   (South Korea)

^b LG Chemical Ltd   (South Korea)

Author keywords

Deep Silicon etching; Microarray; Polymer; Silicon mold; Surface treatment; UV embossing

Indexed keywords

AMORPHOUS FILMS; DEPOSITION; ETCHING; FABRICATION; FLUOROCARBONS; HYDROPHOBICITY; INDUCTIVELY COUPLED PLASMA; PHOTOLITHOGRAPHY; POLYMERS; SILICON; SURFACE ROUGHNESS;

MICROARRAYS; PLASMA-POLYMERIZED FLUOROCARBON (PPFC); SILICON MOLD; SURFACE PROFILER;

SURFACE TREATMENT;

MOLD;

EID: 14644422614     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.08.052     Document Type: Article

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