Characterization and application of a UV-based imprint technique

Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 361-366

  Otto, M ^a   Bender, M ^a   Hadam, B ^a   Spangenberg, B ^a   Kurz, H ^a  

^a UNIVERSITY HOSPITAL RWTH AACHEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

IRRADIATION; PHOTOPOLYMERIZATION; ULTRAVIOLET RADIATION; VISCOSITY;

NANOIMPRINT LITHOGRAPHY (NIL);

NANOTECHNOLOGY;

EID: 0035450409     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00536-6     Document Type: Conference Paper

References (3)