Direct three-dimensional patterning using nanoimprint lithography

Applied Physics Letters

Volumn 78, Issue 21, 2001, Pages 3322-3324

  Li, Mingtao ^a   Chen, Lei ^a   Chou, Stephen Y ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035927018     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1375006     Document Type: Article

References (18)

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