Nanostructuring of polymers and fabrication of interdigitated electrodes by hot embossing lithography

Microelectronic Engineering

Volumn 46, Issue 1, 1999, Pages 121-124

  Schift, H ^a   Jaszewski, R W ^a   David, C ^a   Gobrecht, J ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ETCHING; NANOSTRUCTURED MATERIALS; SEMICONDUCTING POLYMERS; SEMICONDUCTING SILICON; SUBSTRATES;

HOT EMBOSSING LITHOGRAPHY (HEL); INTERDIGITATED ELECTRODES;

LITHOGRAPHY;

EID: 0033130707     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00030-1     Document Type: Article

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