Fine pattern fabrication on glass surface by imprint lithography

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 237-244

  Hirai, Y ^a   Kanakugi, K ^a   Yamaguchi, T ^b   Yao, K ^b   Kitagawa, S ^b   Tanaka, Y ^a  

^a Osaka Prefecture University   (Japan)

^b NALUX Co Ltd   (Japan)

Author keywords

Glass; Grating; Imprint lithography; Optical elements; Pressing

Indexed keywords

HOT PRESSING; LITHOGRAPHY; VISCOELASTICITY;

IMPRINT LITHOGRAPHY;

GLASS;

EID: 0038020951     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00077-7     Document Type: Conference Paper

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