Viscous flow simulation in nanoimprint using coarse-grain method

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 880-883

  Sirotkin, V ^a   Svintsov, A ^a   Zaitsev, S ^a   Schift, H ^b  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

^b PAUL SCHERRER INSTITUTE   (Switzerland)

Author keywords

Computer simulation; Nanoimprint lithography; Stamp deformation; Viscous flow

Indexed keywords

COMPUTER SIMULATION; FORCE MEASUREMENT; LITHOGRAPHY; NAVIER STOKES EQUATIONS; NUMERICAL METHODS; SET THEORY; VELOCITY MEASUREMENT;

COARSE GRAIN METHOD; FINITE DIFFERENCE SCHEMES; NANOIMPRINT LITHOGRAPHY; STAMP DEFORMATION;

VISCOUS FLOW;

EID: 33748283408     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.010     Document Type: Article

References (5)

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2. Schift H., and Heyderman L.J. In: Sotomayor Torres C.M. (Ed). Alternative Lithography (Series: Nanostructure Science and Technology) (2003), Kluwer Academic/Plenum Publishers (Chapter 4)
3. Guo L.J. J. Phys. D 37 (2004) R123-R141
4. Marchuk G.I. Methods of Numerical Mathematics (1975), Springer-Verlag, New York
5. NaPa project, Integrated Project, EU 6th frame program. (accessed 1.10.05).