Nanoreplication in polymers using hot embossing and injection molding

Microelectronic Engineering

Volumn 53, Issue 1, 2000, Pages 171-174

  Schift, H ^a   David, C ^a   Gabriel, M ^b   Gobrecht, J ^a   Heyderman, L J ^a   Kaiser, W ^c   Koppel S ^d   Scandella, L ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b AWM Werkzeugbau   (Switzerland)

^c UNIVERSITY OF APPLIED SCIENCES AND ARTS NORTHWESTERN SWITZERLAND   (Switzerland)

^d Netstal Maschinen AG   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPACT DISKS; DRY ETCHING; ELECTRON BEAM LITHOGRAPHY; INJECTION MOLDING; NANOSTRUCTURED MATERIALS; POLYMERS;

HOT EMBOSSING; NANOREPLICATION;

NANOTECHNOLOGY;

EID: 0034207492     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(00)00289-6     Document Type: Article

References (9)

1. nd Edition. VCH-Verlag (1996).
2. [2] Reimer, L. and Schulte, C., Die Naturwissenschaften, 53 (1996), 489-497.
3. [3] Krauss, P.R. and Chou, S.Y., Appl. Phys. Lett. 71 (21), (1997), 3174-3176.
4. [4] Chui, B.W., Stowe, T.D., Yongho, S.J., Goodson, K.E., Kenny, T.W., Mamin, H.J., Terris, B.D., Ried, R.P., Rugar, D., J. Microelectromechanical Systems (MEMS), Vol. 7. No. 1, (March 1998), 69-78.
5. [5] Jaszewski, R.W., Schift, H., Gobrecht, J. and Smith, P., Microelectronic Eng. 41/42 (1998), 575-578.
6. [6] Macintyre, D. and Thomas, S., Microelectronic Eng. 41/42, (1998), 211-214.
7. [7] Schift, H., Jaszewski, R.W., David, C. and Gobrecht, J., Microelectronic Eng. 46 (1999), 121-124.
8. [8] Köppel, S., Schift, H., Gabriel, M. and Kaiser, W., Kunststoffe-Synthetics 2/99 (1999), 11-14.
9. [9] Schift, H. and Söchtig, J., Microsystem Technologies 4 (1998), 132-134.