Thermal imprint lithography using sub-micron sized nickel template coated with thin SiO2 layer

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1003-1006

  Byeon, Kyeong Jae ^a   Yang, Ki Yeon ^a   Lee, Heon ^a  

^a Korea University   (South Korea)

Author keywords

Anti sticking coating; Nanoimprint lithography; Nickel template; Silane based SAM

Indexed keywords

ELECTROFORMING; NICKEL; SELF ASSEMBLED MONOLAYERS; SILICA; THERMOPLASTICS; THIN FILMS;

ANTISTICKING COATING; NICKEL TEMPLATES; SILANE BASED SAM; THERMOPLASTIC POLYMERS;

NANOIMPRINT LITHOGRAPHY;

FORMING; LITHOGRAPHY; MONOLAYERS; NICKEL; SILICA; THERMOPLASTICS; THIN FILMS;

EID: 34247627440     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.102     Document Type: Article

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