Fabrication of 50 nm patterned nickel stamp with hot embossing and electroforming process

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 977-979

  Hong, Sung Hoon ^a   Lee, Jong Hwa ^a   Lee, Heon ^a  

^a Korea University   (South Korea)

Author keywords

Hot embossing; Nanoimprint lithography; Nickel stamp

Indexed keywords

ELECTROFORMING; NANOIMPRINT LITHOGRAPHY; NICKEL; POLYMER FILMS; POLYVINYL CHLORIDES;

HOT EMBOSSING LITHOGRAPHY; NICKEL IMPRINT STAMPS; NICKEL STAMPS;

STAMPING;

FORMING; LITHOGRAPHY; NICKEL; POLYVINYL CHLORIDE; STAMPS; THIN FILMS;

EID: 34247620822     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.101     Document Type: Article

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