Nanoimprint fabrication of micro-rings for magnetization reversal studies

Microelectronic Engineering

Volumn 57-58, Issue , 2001, Pages 405-410

  Chen, Y ^a   Lebib, A ^a   Li, S P ^a   Natali, M ^a   Peyrade, D ^a   Cambril, E ^a  

^a CNRS   (France)

Author keywords

Magnetic ring arrays; Nanoimprint lithography; Tri layer resist system

Indexed keywords

COBALT; LITHOGRAPHY; MAGNETIZATION; OPTICAL KERR EFFECT;

NANOIMPRINT LITHOGRAPHY;

NANOSTRUCTURED MATERIALS;

EID: 4243706604     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00448-8     Document Type: Conference Paper

References (18)