Fabrication of photonic crystal structures on light emitting diodes by nanoimprint lithography

Nanotechnology

Volumn 18, Issue 5, 2007, Pages

  Kim, Sang Hoon ^a   Lee, Ki Dong ^a   Kim, Ja Yeon ^b   Kwon, Min Ki ^b   Park, Seong Ju ^b  

^a LG Electronics Inc   (South Korea)

^b Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; HEAT TREATMENT; LIGHT EMITTING DIODES; LIGHT INTERFERENCE; NANOIMPRINT LITHOGRAPHY; PHOTOLUMINESCENCE; PHOTORESISTORS;

LASER INTERFERENCE LITHOGRAPHY; NINE-FOLD ENHANCEMENT; PILLAR STRUCTURE; STAMP FABRICATION;

PHOTONIC CRYSTALS;

ARTICLE; CRYSTAL STRUCTURE; LASER; LIGHT EMITTING DIODE; PHOTON; PRIORITY JOURNAL; SAMPLE; TECHNIQUE;

CRYSTAL STRUCTURE;

EID: 33947527279     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/5/055306     Document Type: Article

References (25)

1. Craford M G 1992 IEEE Circuits Devices Mag. 8 24
2. Nishida T, Saito H and Kobayashi N 2001 Appl. Phys. Lett. 79 711
3. Krames M R et al 1999 Appl. Phys. Lett. 75 2365
4. Mensz P M, Kellawon P, Van Roijen R, Kozodoy P and Denbaars S 1997 Electron. Lett. 33 2066
5. Kim J K, Gessmann T, Luo H and Schubert E F 2004 Appl. Phys. Lett. 84 4508
6. Huh C, Lee K-S, Kang E-J and Park S-J 2003 J. Appl. Phys. 93 9383
7. Schnitzer I, Yablonovitch E, Caneau C, Gmitter T J and Scherer A 1993 Appl. Phys. Lett. 63 2174
8. Windisch R, Heremans P, Knobloch A, Kiesel P, Döhler G H, Dutta B and Borghs G 1999 Appl. Phys. Lett. 74 2256
9. Fujii T, Gao Y, Sharma R, Hu E L, DenBaars S P and Nakamura S 2004 Appl. Phys. Lett. 84 855
10. Wierer J J et al 2001 Appl. Phys. Lett. 78 3379
11. Oder T N, Kim K H, Lin J Y and Jiang H X 2004 Appl. Phys. Lett. 84 466
12. Kim D-H et al 2005 Appl. Phys. Lett. 87 203508
13. Ryu H-Y, Hwang J-K, Lee Y-J and Lee Y-H 2002 IEEE J. Sel. Top. Quantum Electron. 8 238
14. Ichikawa H and Baba T 2004 Appl. Phys. Lett. 84 457
15. Oder T N, Shakya J, Lin J Y and Jiang H X 2003 Appl. Phys. Lett. 83 1231
16. Shakya J, Kim K H, Lin J Y and Jiang H X 2004 Appl. Phys. Lett. 85 142
17. Wierer J J, Krames M R, Epler J E, Gardner N F, Craford M G, Wendt J R, Simmons J A and Sigalas M M 2004 Appl. Phys. Lett. 84 3885
18. Ryu H Y, Lee Y H, Sellin R L and Bimberg D 2001 Appl. Phys. Lett. 79 3573
19. Erchak A, Ripin D J, Fan S H, Rakich P, Joannoupoulos J D, Ippen E P, Petrich G S and Kolodziejski L A 2001 Appl. Phys. Lett. 78 563
20. Chou S Y, Krauss P R and Penstrom P J 1995 Appl. Phys. Lett. 67 3114
21. Ahn S W, Lee K D, Kim J S, Kim S H, Park J D, Lee S H and Yoon P W 2005 Nanotechnology 16 1874
22. Choi C G, Kee C S and Schift H 2006 Curr. Appl. Phys. 6S1 e8
23. Borodisky M, Krauss T F, Coccioli R, Brijen R, Bhat R and Yablonovitch E 1999 Appl. Phys. Lett. 75 1036
24. Boroditsky M, Coccioli R and Yablonovitch E 1998 Proc. SPIE 3283 184
25. Yu Z, Chen L, Wu W, Ge H and Chou S Y 2003 J. Vac. Sci. Technol. B 21 2089