Impact of polymer film thickness and cavity size on polymer flow during embossing: Toward process design rules for nanoimprint lithography

Journal of Micromechanics and Microengineering

Volumn 15, Issue 12, 2005, Pages 2414-2425

  Rowland, Harry D ^a   Sun, Amy C ^b   Schunk, P Randy ^b   King, William P ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPILLARITY; CONTINUUM MECHANICS; LAMINAR FLOW; LITHOGRAPHY; PLASTIC FILMS; PRODUCT DESIGN; THICKNESS MEASUREMENT; VISCOSITY;

CAVITY FILLING; FILM THICKNESS; POLYMER FILMS; POLYMER FLOW;

PLASTIC FLOW;

EID: 27944505464     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/15/12/025     Document Type: Article

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