AFM characterization of anti-sticking layers used in nanoimprint

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 851-854

  Tallal, J ^a   Gordon, M ^a   Berton, K ^a   Charley, A L ^a   Peyrade, D ^a  

^a Joseph Fourier University   (France)

Author keywords

AFM; Anti sticking layers; Demolding step; Nano indentation; Nanoimprint

Indexed keywords

ADHESION; CONTACT ANGLE; FORCE CONTROL; NANOTECHNOLOGY; OPTICAL RESOLVING POWER; SUBSTRATES;

ANTI-STICKING LAYERS; DEMOLDING STEP; NANO-INDENTATION; NANOIMPRINT;

ATOMIC FORCE MICROSCOPY;

EID: 33646069964     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.011     Document Type: Article

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