Novel transparent hybrid polymer working stamp for UV-imprinting

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 697-699

  Klukowska, Anna ^a   Kolander, Anett ^a   Bergmair, Iris ^b   Mühlberger, Michael ^b   Leichtfried, Hannes ^b   Reuther, Freimut ^a   Grützner, Gabi ^a   Schöftner, Rainer ^b  

^a MICRO RESIST TECHNOLOGY GMBH   (Germany)

^b PROFACTOR GMBH   (Austria)

Author keywords

Hybrid polymer; Nano stamp; Nanoimprint; Working stamps durability

Indexed keywords

HYBRID POLYMER; INORGANIC-ORGANIC HYBRID POLYMERS; NANO-STAMP; NANOIMPRINT; NANOIMPRINT TECHNOLOGIES; THERMALLY STABLES; WORKING STAMPS DURABILITY;

DURABILITY; OXIDE MINERALS; QUARTZ;

POLYMERS;

EID: 67349232285     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.12.088     Document Type: Article

References (5)

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