Electron beam-induced nano-deposition using a transmission electron microscope

Materials Science Forum

Volumn 480-481, Issue , 2005, Pages 129-132

  Shimojo, M ^a,b   Mitsuishi, K ^a   Tanaka, M ^a   Song, M ^a   Furuya, K ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Deposition; Electron beam; Metal organic gas; Nano fabrication; Structure

Indexed keywords

DEPOSITION; ELECTRON BEAMS; ELECTRON IRRADIATION; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

BEAM POSITION; FOCUSED ELECTRON BEAMS; METAL ORGANIC GAS;

NANOSTRUCTURED MATERIALS;

EID: 33749495129     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-962-8.129     Document Type: Conference Paper

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