Electron interactions with CF4

Journal of Physical and Chemical Reference Data

Volumn 25, Issue 5, 1996, Pages 1341-1388

  Christophorou, L G ^a,b   Olthoff, J K ^a   Rao, M V V S ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b UNIVERSITY OF TENNESSEE   (United States)

Author keywords

Attachment; Carbon tetrafluoride; CF4; Cross sections; Dissociation; Electron interactions; Fragments; Ionization; Scattering; Transport

Indexed keywords

COLLISIONAL PLASMAS; DISSOCIATION; ELECTRON ENERGY LEVELS; ELECTRON SCATTERING; ELECTRON TRANSPORT PROPERTIES; GAS MIXTURES; GASES; IONIZATION; IONIZATION OF GASES; PHOTODISSOCIATION; SCATTERING; SEMICONDUCTOR DEVICES;

ATTACHMENT; CARBON TETRAFLUORIDE; CROSS SECTIONS; ELECTRON INTERACTION; FRAGMENTS; TRANSPORT;

IMPACT IONIZATION;

EID: 0030503029     PISSN: 00472689     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.555986     Document Type: Article

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