A Monte Carlo modeling of electron interaction with solids including cascade secondary electron production

Scanning

Volumn 18, Issue 2, 1996, Pages 92-113

  Ding, Z J ^a,b   Shimizu, R ^b  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

cascade secondary electrons; dielectric function; Monte Carlo electron trajectory simulations

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; ELECTRON EMISSION; ELECTRON MICROSCOPY; ELECTRON SPECTROSCOPY; ELECTRONS; MATHEMATICAL MODELS; MONTE CARLO METHODS; SOLIDS;

CASCADE SECONDARY ELECTRON PRODUCTION; DIELECTRIC FUNCTION; ELECTRON INTERACTION;

ELECTRON SCATTERING;

ARTICLE; ELECTRON MICROSCOPY; MATHEMATICAL MODEL; PRIORITY JOURNAL; SYSTEM ANALYSIS;

EID: 0030110843     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.1996.4950180204     Document Type: Article

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