Fabrication of field emitter array using focused ion and electron beam induced reaction

Microelectronic Engineering

Volumn 41-42, Issue , 1998, Pages 453-456

  Takai, M ^a   Kishimoto, T ^a   Morimoto, H ^a   Park, Y K ^a   Lipp, S ^b   Lehrer, C ^b   Frey, L ^b   Ryssel, H ^b   Hosono, A ^c   Kawabuchi, S ^c  

^a OSAKA UNIVERSITY   (Japan)

^b FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS IIS   (Germany)

^c MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS; ELECTRON BEAMS; FABRICATION; ION BEAMS;

FIELD EMITTER ARRAY;

FIELD EMISSION CATHODES;

EID: 0031674743     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00105-1     Document Type: Article

References (5)

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2. M. Takai, Nucl. Instr. and Meth. B85 (1994) 664.
3. S. Matsui and K. Mori, J. Vac. Sci. Technol. B4 (1986) 299.
4. H.W.P. Koops, J. Kretz, M. Rudolph, M. Weber, G. Dahm and K.L. Lee, Jpn. J. Appl. Phys. 33 (1994) 1345.
5. Y.K. Park, M. Takai, T. Nagai, T. Kishimoto, A. Seidl, C. Lehrer, L. Frey, and H. Ryssel, Nucl. Instr. and Meth. (in press)