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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 2515-2521

Focused ion beam direct deposition and its applications

(3) Nagamachi, Shinji a Ueda, Masahiro a Ishikawa, Junzo b

a SHIMADZU CORPORATION (Japan)

b KYOTO UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000071190 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.590201 Document Type: Article

Times cited : (18)

References (14)

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