Electron-beam-induced deposition of Pt for field emitter arrays

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers

Volumn 35, Issue 12 B, 1996, Pages

  Morimoto, Hiroji ^a   Kishimoto, Takehisa ^a   Takai, Mikio ^a   Yura, Shinsuke ^a   Hosono, Akihiko ^a   Okuda, Soichiro ^a   Lipp, Stephan ^a   Frey, Lothar ^a   Ryssel, Heiner ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; DEPOSITION; ELECTRIC CURRENTS; ELECTRODES; ELECTRON BEAMS; ELECTRON EMISSION; ETCHING; FABRICATION; FIELD EMISSION CATHODES; ION BEAMS; SILICON;

ELECTRON BEAM INDUCED DEPOSITION; EMISSION CURRENT; EXTRACTION VOLTAGE; FIELD EMISSION; FIELD EMITTER ARRAYS; FOCUSED ION BEAM ETCHING; GATE ELECTRODES;

PLATINUM;

EID: 0030419696     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Review

References (9)