Focused electron beam induced deposition of high resolution magnetic scanning probe tips

Materials Research Society Symposium - Proceedings

Volumn 706, Issue , 2002, Pages 307-312

  Utke, I ^a   Cicoira, F ^a   Jaenchen, G ^a   Hoffmann, P ^a   Scandella, L ^a   Dwir, B ^a   Kapon, E ^a   Laub, D ^a   Buffat, P ^a   Xanthopoulos, N ^a   Mathieu, H J ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CHEMICAL REACTIONS; CHEMICAL VAPOR DEPOSITION; COMPOSITION; ELECTRIC CONDUCTIVITY; ELECTRON BEAMS; MAGNETIC STORAGE; PHYSICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SELF ASSEMBLY;

BOUDOUARD REACTIONS; FOCUSED ELECTRON BEAM INDUCED DEPOSITION; HIGH RESOLUTION MAGNETIC SCANNING PROBE TIPS; SCANNING PROBE MICROSCOPY;

NANOSTRUCTURED MATERIALS;

EID: 0036351770     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)