Spatial resolution limits in electron-beam-induced deposition

Journal of Applied Physics

Volumn 98, Issue 8, 2005, Pages

  Silvis Cividjian, N ^a   Hagen, C W ^a   Kruit, P ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON-BEAM-INDUCED DEPOSITION (EBID); SOLID TARGETS;

DISSOCIATION; ELECTRON SCATTERING; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON BEAMS;

EID: 27744484845     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2085307     Document Type: Article

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