Energy transfer between electrons and photoresist: Its relation to resolution

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 3297-3302

  Han, Geng ^a   Cerrina, Franco ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRON BEAM LITHOGRAPHY; ELECTRON TRANSITIONS; MONTE CARLO METHODS; NANOTECHNOLOGY; PHOTONS;

DIELECTRIC FUNCTIONS;

PHOTORESISTS;

EID: 0034315090     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1318188     Document Type: Article

References (11)

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