Lateral tunnel junction produced by electron-beam-induced deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2809-2815

  Komuro, Masanori ^a   Hiroshima, Hiroshi ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342555179     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589733     Document Type: Article

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