Fabrication of carbon nanotips in a scanning electron microscope for use as electron field emission sources

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 665-670

  Johnson, S D ^a   Hasko, D G ^a   Teo, K B K ^b   Milne, W I ^b   Ahmed, H ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Carbon contamination; Field emission; Nanotip

Indexed keywords

AMORPHOUS MATERIALS; CARBON; CONTAMINATION; FABRICATION; PLASMA ETCHING; SCANNING ELECTRON MICROSCOPY; STRUCTURE (COMPOSITION);

CARBON NANOTIPS;

NANOTECHNOLOGY;

EID: 0036643654     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00431-8     Document Type: Article

References (10)