Modeling of focused ion beam induced surface chemistry

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 3190-3193

  Edinger, Klaus ^a   Kraus, Thomas ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; COMPUTER SIMULATION; DEPOSITION; DESORPTION; DIFFERENTIAL EQUATIONS; ION BEAMS; MATHEMATICAL MODELS;

ION FLUX;

SURFACE CHEMISTRY;

EID: 0034316533     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1321761     Document Type: Article

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