Review on atomic layer deposition and applications of oxide thin films

Critical Reviews in Solid State and Materials Sciences

Volumn 38, Issue 3, 2013, Pages 203-233

  Ponraj, Joice Sophia ^a,b   Attolini, Giovanni ^a   Bosi, Matteo ^a  

^a IMEM CNR   (Italy)

^b ANNA UNIVERSITY   (India)

Author keywords

applications; atomic layer deposition; review; surface chemistry

Indexed keywords

ATOMIC LAYER; GROWTH MECHANISMS; HIGH ASPECT RATIO STRUCTURES; MEMORY STATE; MEMRISTOR; NON-VOLATILE MEMORY; OXIDE THIN FILMS; PHOTOVOLTAICS;

APPLICATIONS; DATA STORAGE EQUIPMENT; DEPOSITION; MEMRISTORS; PASSIVE FILTERS; REVIEWS; SURFACE CHEMISTRY; THIN FILMS;

ATOMIC LAYER DEPOSITION;

EID: 84879556804     PISSN: 10408436     EISSN: 15476561     Source Type: Journal    
DOI: 10.1080/10408436.2012.736886     Document Type: Review

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