Aluminum doped zinc oxide films grown by atomic layer deposition for organic photovoltaic devices

Solar Energy Materials and Solar Cells

Volumn 94, Issue 8, 2010, Pages 1379-1383

  Saarenpää, Hanna ^a   Niemi, Tapio ^a   Tukiainen, Antti ^a   Lemmetyinen, Helge ^a   Tkachenko, Nikolai ^a  

^a TAMPERE UNIVERSITY OF TECHNOLOGY   (Finland)

Author keywords

Aluminum doped zinc oxide; Atomic layer deposition; Organic solar cells

Indexed keywords

ALUMINUM DOPED ZINC OXIDE; ALUMINUM DOPED ZINC OXIDE FILMS; AZO FILMS; DEPOSITION CYCLES; DEPOSITION TEMPERATURES; DIETHYLZINC; INDIUM TIN OXIDE; ORGANIC PHOTOVOLTAIC DEVICES; ORGANIC SOLAR CELL; PHOTOACTIVE LAYERS; PHOTOVOLTAIC APPLICATIONS; REFERENCE DEVICES; TIME INTERVAL; TRANSPARENT ELECTRODE; TRANSPARENT ELECTRODE MATERIALS; TRIMETHYLALUMINUM; UNIFORM FILMS;

ALUMINUM; ALUMINUM COATINGS; ATOMIC LAYER DEPOSITION; ATOMS; DEPOSITION; ELECTROCHEMICAL ELECTRODES; ITO GLASS; PHOTOVOLTAIC EFFECTS; SOLAR CELLS; THICK FILMS; TIN; TITANIUM COMPOUNDS; ZINC; ZINC OXIDE;

OXIDE FILMS;

EID: 77953140100     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2010.04.006     Document Type: Article

References (35)

1. Adurodija F.O. Lasers in thin film processing. In: Nalwa H.S. (Ed). Handbook of Thin Film Materials (2002), Academic Press, San Diego 162
2. Xu D., Deng Z., Xu Y., Xiao J., Liang C., Pei Z., and Sun C. An anode with aluminum doped on zinc oxide thin films for organic light emitting devices. Phys. Lett. A 346 (2005) 148-152
3. Owen J., Son M.S., Yoo K.-H., Ahn B.D., and Lee S.Y. Organic photovoltaic devices with Ga-doped ZnO electrode. Appl. Phys. Lett. 90 (2007) 033512
4. Tanaka A., Hirata M., Kiyohara Y., Nakano M., Omae K., Shiratani M., and Koga K. Review of pulmonary toxicity of indium compounds to animals and humans. Thin Solid Films 518 (2009) 2934-2936
5. Strange M., Plackett D., Kaasgaard M., and Krebs F.C. Biodegradable polymer solar cells. Sol. Energy Mater. Sol. Cells 92 (2008) 805-813
6. Ellmer K., and Klein A. ZnO and its applications. In: Ellmer K., Klein A., and Rech B. (Eds). Transparent Conductive Zinc Oxide Basics and Applications in Thin Film Solar Cells (2008), Spinger-Verlag, Berlin, Heidelberg 1-34
7. Ellmer K. Electrical properties. In: Ellmer K., Klein A., and Rech B. (Eds). Transparent Conductive Zinc Oxide Basics and Applications in Thin Film Solar Cells (2008), Spinger-Verlag, Berlin, Heidelberg 1-34
8. Park S.-H.K., Lee J.-I., Hwang C.-S., and Chu H.Y. Characteristics of organic light emitting diodes with Al-doped ZnO anode deposited by atomic layer deposition. Jpn. J. Appl. Phys. 44 (2005) L242-L245
9. White M.S., Olson D.C., Shaheen S.E., Kopidakis N., and Ginley D.S. Inverted bulk-heterojunction organic photovoltaic device using a solution-derived ZnO underlayer. Appl. Phys. Lett. 89 (2006) 143517-1-143517-3
10. Schulze K., Maenning B., Leo K., Tomita Y., May C., Hüpkes J., Brier E., Reinold E., and Bäuerle P. Organic solar cells on indium tin oxide and aluminum doped zinc oxide anodes. Appl. Phys. Lett. 91 (2007) 073521-1-073521-3
11. Park S., Tark S.J., Lee J.S., Lim H., and Kim D. Effects of intrinsic ZnO buffer layer based on P3HT/PCBM organic solar cells with Al doped ZnO electrode. Sol. Energy Mater. Sol. Cells 93 (2009) 1020-1023
12. Murdoch G.B., Hinds S., Sargent E.H., Tsang S.W., Mordoukhovski L., and Lu Z.H. Aluminum doped zinc oxide for organic photovoltaics. Appl. Phys. Lett. 94 (2009) 213301-1-213301-3
13. Fernández S., and Naranjo F.B. Optimization of aluminum-doped zinc oxide films deposited at low temperature by radio-frequency sputtering on flexible substrates for solar cell applications. Sol. Energy Mater. Sol. Cells 94 (2010) 157-163
14. Bhosle V., Prater J.T., Yang F., Burk D., Forrest S.R., and Narayan J. Gallium-doped zinc oxide films as transparent electrodes for organic solar cell applications. J. Appl. Phys. 102 (2002) 023501-1-023501-5
15. Faÿ S., Kroll U., Bucher C., Vallat-Sauvain E., and Shah A. Low pressure chemical vapour deposition of ZnO layers for thin film solar cells: temperature-induced morphological changes. Sol. Energy Mater. Sol. Cells 86 (2005) 385-397
16. Krebs F.C., Jørgensen M., Norrmann K., Hagemann O., Alstrup J., Nielsen T.D., Fyenbo J., Larsen K., and Kristensen J. A complete process for production of flexible large area polymer solar cells entirely using screen printing-first public demonstration. Sol. Energy Mater. Sol. Cells 93 (2009) 422-441
17. Krebs F.C. Polymer solar cell modules prepared using roll-to-roll methods: knife-over-edge coating, slot die coating and screen printing. Sol. Energy Mater. Sol. Cells 93 (2009) 465-475
18. Ritala M., and Leskelä M. Atomic layer deposition. In: Nalwa H.S. (Ed). Handbook of Thin Film Materials (2002), Academic Press, San Diego 103-159
19. T. Suntola, J. Antson, US Patent 4058430 (1977).
20. Leskelä M., and Ritala M. Atomic layer deposition (ALD): from precursors to thin films structures. Thin Solid Films 498 (2002) 138-146
21. Puurunen R.L. Surface chemistry of atomic layer deposition: a case study for trimethylaluminum/water process. J. Appl. Phys. 97 (2005) 121301-1-121301-52
22. Niinistö L., Päiväsaari J., Niinistö J., Putkonen M., and Nieminen M. Advanced electronic and optoelectronic materials by ALD: an overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials. Phys. Status Solidi A 201 (2004) 1443-1452
23. Vivo P., Ojala M., Chukharev V., Efimov A., and Lemmetyinen H. Role of a phthalocyanine-fullerene dyad in multilayered organic solar cells. J. Photochem. Photobiol. A 203 (2009) 125-130
24. Ritala M., Asikainen T., Leskelä M., and Skarp J. ALE growth of transparent conductors. Mater. Res. Soc. Symp. Proc. 426 (1996) 513-518
25. Lujala V., Skarp J., Tammenmaa M., and Suntola T. Atomic layer epitaxy growth of doped zinc oxide films from organometals. Appl. Surf. Sci. 82-83 (1994) 34-40
26. Vivo P., Jukola J., Ojala M., Chukharev V., and Lemmetyinen H. Influence of Alq3/Au cathode on stability and efficiency of a layered organic solar cell in air. Sol. Energy Mater. Sol. Cells 92 (2008) 1416-1420
27. Kowalik I.A., Guziewich E., Kopalko K., Yatsunenko S., Wójcik-Glodowska A., Godlewski M., DŁuzewski P., łusakowska E., and Paszkowicz W. Structural and optical properties of low-temperature ZnO films grown by atomic layer deposition with diethylzinc and water precursors. J. Cryst. Growth 311 (2009) 1096-1101
28. 3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements. Thin Solid Films 414 (2002) 43-55
29. Lim J., and Lee C. Effects of substrate temperature on the microstructure and photoluminescence properties of ZnO thin films prepared by atomic layer deposition. Thin Solid Films 515 (2007) 3335-3338
30. Na J.-S., Peng Q., Scarel G., and Parsons G.N. Role of gas doping sequence in surface reactions and dopant incorporation during atomic layer deposition of Al-doped ZnO. Chem. Mater. 21 (2009) 5585-5593
31. Na J.-S., Scarel G., and Parsons G.N. In situ analysis of dopant incorporation, activation, and film growth during thin film ZnO and ZnO:Al atomic layer deposition. J. Phys. Chem. C 114 (2010) 383-388
32. Yun J.-J., Jung H.-S., Kim S.-H., and Han E.-M. Chlorophyll-layer-inserted poly(3-hexyl-thiophene) solar cell having a high light-to-current conversion efficiency up to 1.48%. Appl. Phys. Lett. 87 (2005) 123102
33. Chiş V., Mile G., Ştiufiuc R., Leopold N., and Oltean M. Vibrational and electronic structure of PTCDI and melamine-PTCDI complexes. J. Mol. Struct. 924-926 (2009) 47-53
34. Jørgensen M., Norrman K., and Krebs F.C. Stability/degradation of polymer solar cells. Sol. Energy Mater. Sol. Cells 91 (2008) 686-714
35. Krebs F.C., and Norrman K. Analysis of the failure mechanism for a stable organic photovoltaic during 10,000 h of testing. Prog. Photovoltaics: Res. Appl. 15 (2007) 697-712